Specimen block preparation for TEM analysis

Details Specimen block preparation for TEM analysis Specimen block preparation for TEM analysis

1998-05-07

1999-11-30

Scherbel, David A.

Abrading

Abrading process

451 31, 451 29, 451 41, B24B 100

Patent

active

059932910

ABSTRACT:
A method for preparing a specimen block for TEM analysis that uses target point breaking of an original specimen block into two separate blocks with one block containing the point targeted for analysis. Hence, over-polishing can be avoided and polishing time is saved. Furthermore, polishing is carried out by sandwiching the specimen block between sacrificial blocks supported by polish-resistant blocks below. With the polish-resistant blocks acting as a polishing stop layer, a fixed thickness instead of variable thickness will remain after the specimen is polished.

REFERENCES:
patent: 5191738 (1993-03-01), Nakazato et al.

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