Specification determining method, projection optical system...

Details Specification determining method, projection optical system... Specification determining method, projection optical system...

2007-05-08

2007-05-08

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S055000, C355S057000, C355S077000

Reexamination Certificate

active

11214795

ABSTRACT:
An exposure apparatus for transferring a pattern onto an object via a projection optical system, including a moving body arranged on an image plane side with respect to the projection optical system, a wave-front measuring unit at least a part of which is arranged in the moving body, and which measures wave-front information of the projection optical system, an adjusting unit that adjusts a state of an image of a projected pattern generated on the object via the projection optical system, and a controller that controls the adjusting unit using the wave-front information and Zernike Sensitivity corresponding to exposure conditions of the object.

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