Specialty gas purification system

Details Specialty gas purification system Specialty gas purification system

1996-03-01

1998-11-10

Spitzer, Robert

Gas separation: processes

Solid sorption

With plural indirect heat transfer steps on solid sorbent or...

95122, 95138, 95139, 95140, 96130, 96144, B01D 5304, B01D 5326

Patent

active

058337385

ABSTRACT:
A method and apparatus are disclosed showing a system for continuous purification of bulk source specialty gases to less than 10 part per billion levels. Corrosive and non-corrosive specialty gases are purified using this system. Depending on whether corrosive or non-corrosive gases are being purified and the contaminants of concern, the purification beds contain an absorber and/or getter. A dual bed system allows one bed to purify at ambient temperatures while a second bed undergoes regeneration, providing continuous purification for a bulk source specialty gas.

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