Spatula for wafer transport

Details Spatula for wafer transport Spatula for wafer transport

1988-04-25

1989-09-19

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414416, 414749, 414222, 414785, 414331, B65G 6504

Patent

active

048676314

ABSTRACT:
In apparatus for transporting semiconductor wafers, a spatula contains a single major recess for receiving a wafer. Adjacent one edge of the recess is a shoulder for locating the wafer in the sequence of operations for loading the spatula. As a result of the sequence, the center of the wafer is held at a predetermined, known location.

REFERENCES:
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 4002254 (1977-11-01), Olofsen
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4433951 (1984-02-01), Koch et al.
patent: 4465416 (1984-08-01), Burkhalter et al.
patent: 4542712 (1985-09-01), Sato et al.
patent: 4558984 (1985-12-01), Garrett
patent: 4744713 (1988-05-01), Hrovath

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