Spatula for wafer transport

Details Spatula for wafer transport Spatula for wafer transport

1990-08-03

1991-01-15

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414749, 414331, 118719, B65G 110

Patent

active

049849549

ABSTRACT:
In apparatus for transporting semiconductor wafers, a spatula contains a single major recess for receiving a wafer. Adjacent one edge of the recess is a shoulder for locating the wafer in the sequence of operations for loading the spatula. As a result of the sequence, the center of the wafer is held at a predetermined, known location.

REFERENCES:
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 4002254 (1977-01-01), Olofsen
patent: 4433951 (1984-02-01), Koch et al.
patent: 4542712 (1985-09-01), Sato et al.
patent: 4810473 (1989-03-01), Tamura et al.

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