Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Patent
1998-04-30
2000-12-05
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
25037001, 257435, H01L 2714
Patent
active
061570354
ABSTRACT:
A novel radiation detector, a detection principle and an associated structure are provided for semiconductor substrate detectors in general and for CMOS based circuits in particular. For an optical detector, photons absorbed in the neutral zone of the substrate generate electron hole pairs that migrate by diffusion. A shadow mask gives a spatial modulation to the incident, and consequently, to the absorbed light in the semiconductor substrate. By measuring the magnitude of the spatial frequency component in the minority carrier distribution with a spatial frequency corresponding to that of the shadow mask, a fast detector is conceived. A shadow mask with higher spatial modulation frequency delivers a faster turn-off. The combination of a plurality of these detectors with an image fiber forms a basic system for constructing high-speed parallel optical interconnects between chips.
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Levine, B.F., et al., "1 Gb/s Si High Quantum Efficiency Monolithically Integrable .lambda.=0.88 .mu.m Detector", Applied Physics Letters, vol. 66, No. 22, May 29, 1995, pp. 2084-2986.
Coppee Daniel
Heremans Paul
Kuijk Maarten
Vounckx Roger
Hanig Richard
Hannaher Constantine
IMEC
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