Spatial uniformity varier for microlithographic illuminator

Details Spatial uniformity varier for microlithographic illuminator Spatial uniformity varier for microlithographic illuminator

1995-02-27

1995-10-24

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 70, 355 71, G03B 2754

Patent

active

054614562

ABSTRACT:
A microlithographic projection imager has an illuminator system that is adjustable for the uniformity of spatial intensity of the illumination delivered to the wafer plane. This uniformity adjustment can compensate for factors tending to deviate the illumination from uniformity. The uniformity adjusting member is preferably refractive and axially movable next to a pupil of the illuminator.

REFERENCES:
patent: 4229097 (1980-10-01), Vulmiere et al.
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5014086 (1991-05-01), Barry
patent: 5113244 (1992-05-01), Curran
patent: 5245384 (1993-09-01), Mori

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