Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-10-04
2005-10-04
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S295000, C359S298000
Reexamination Certificate
active
06952301
ABSTRACT:
A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.
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Lester Evelyn A.
Muir Gregory R.
Reflectivity, Inc
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