Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-07-29
2008-07-29
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S292000, C359S295000, C359S298000, C359S224200, C345S085000, C345S108000
Reexamination Certificate
active
07405860
ABSTRACT:
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
REFERENCES:
patent: 3517126 (1970-06-01), Yamada et al.
patent: 3553364 (1971-01-01), Lee
patent: 3600798 (1971-08-01), Lee
patent: 3678196 (1972-07-01), Roth
patent: 3746785 (1973-07-01), Goodrich
patent: 3746911 (1973-07-01), Nathanson et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4178077 (1979-12-01), Te Velde
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4309242 (1982-01-01), Te Velde
patent: 4356730 (1982-11-01), Cade
patent: 4383255 (1983-05-01), Grandjean et al.
patent: 4403248 (1983-09-01), Te Velde
patent: 4492435 (1985-01-01), Banton et al.
patent: 4564836 (1986-01-01), Vuilleumier et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4592628 (1986-06-01), Altman et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 4680579 (1987-07-01), Ott
patent: 4698602 (1987-10-01), Armitage
patent: 4710732 (1987-12-01), Hornbeck
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 4805038 (1989-02-01), Seligson
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4998262 (1991-03-01), Wiggers
patent: 5061049 (1991-10-01), Horbeck
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5085497 (1992-02-01), Um et al.
patent: 5196767 (1993-03-01), Leard et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5287215 (1994-02-01), Warde et al.
patent: 5293511 (1994-03-01), Poradish et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5416514 (1995-05-01), Janssen et al.
patent: 5442414 (1995-08-01), Janssen et al.
patent: 5444566 (1995-08-01), Gale et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5471341 (1995-11-01), Warde et al.
patent: 5493439 (1996-02-01), Engle
patent: 5508738 (1996-04-01), Janssen et al.
patent: 5527744 (1996-06-01), Mignardi et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5552925 (1996-09-01), Worley
patent: 5557177 (1996-09-01), Engle
patent: 5567334 (1996-10-01), Baker et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5579151 (1996-11-01), Cho
patent: 5583688 (1996-12-01), Hornbeck
patent: 5631782 (1997-05-01), Smith et al.
patent: 5636070 (1997-06-01), Ji et al.
patent: 5669687 (1997-09-01), Yang
patent: 5677784 (1997-10-01), Harris
patent: 5706061 (1998-01-01), Marshall et al.
patent: 5719695 (1998-02-01), Heimbuch
patent: 5768009 (1998-06-01), Little
patent: 5774196 (1998-06-01), Marshall
patent: 5784190 (1998-07-01), Worley
patent: 5808780 (1998-09-01), McDonald
patent: 5835256 (1998-11-01), Huibers
patent: 5872046 (1999-02-01), Kaeriyama et al.
patent: 5915168 (1999-06-01), Salatino et al.
patent: 5926309 (1999-07-01), Little
patent: 5963289 (1999-10-01), Stefanov et al.
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6053617 (2000-04-01), Kaeriyama
patent: 6071616 (2000-06-01), Sulzbach et al.
patent: 6072236 (2000-06-01), Akram et al.
patent: 6107115 (2000-08-01), Atobe et al.
patent: 6165885 (2000-12-01), Gaynes et al.
patent: 6207548 (2001-03-01), Akram et al.
patent: 6232150 (2001-05-01), Lin et al.
patent: 6252229 (2001-06-01), Hays et al.
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6287940 (2001-09-01), Cole et al.
patent: 6303986 (2001-10-01), Shook
patent: 6323550 (2001-11-01), Martin et al.
patent: 6353492 (2002-03-01), McClelland et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6469821 (2002-10-01), Bartlett et al.
patent: 6590695 (2003-07-01), Kurtz et al.
patent: 6753846 (2004-06-01), Takeuchi et al.
patent: 6806992 (2004-10-01), Soneda et al.
patent: 6906847 (2005-06-01), Huibers et al.
patent: 6952301 (2005-10-01), Huibers
patent: 2001/0007372 (2001-07-01), Akram et al.
patent: 2001/0022207 (2001-09-01), Hays et al.
patent: 2001/0034076 (2001-10-01), Martin
patent: 2002/0056900 (2002-05-01), Liu et al.
patent: 2002/0109903 (2002-08-01), Kaeriyama
patent: 2002/0126389 (2002-09-01), Moseley et al.
patent: 2003/0008477 (2003-01-01), Kang et al.
patent: 2004/0027636 (2004-02-01), Miles
patent: 2004/0100594 (2004-05-01), Huibers et al.
patent: 2004/0100680 (2004-05-01), Huibers et al.
patent: 0069226 (1986-03-01), None
patent: 1097901 (2001-05-01), None
patent: 1101730 (2001-05-01), None
patent: 1167281 (2002-01-01), None
patent: 2001129800 (2001-05-01), None
patent: 2001144117 (2001-05-01), None
patent: 2001196484 (2001-07-01), None
patent: WO-01/10718 (2001-02-01), None
patent: WO-01/20671 (2001-03-01), None
patent: WO-02/12116 (2002-02-01), None
patent: WO-02/12116 (2002-02-01), None
Jaecklin, “Line-Addressable Torsional Micromirrors for Light Modulator Arrays”, Sensor and Actuators A, 41-42, Elsevier Science, pp. 324-329, date unknown.
Gerhard-Multhaupt et al., “Light-Valve Projection Displays—An Introduction”, Displays, vol. 16, No. 1, 1995, Elsevier Science B.V., pp. 5-7.
Gerhard-Multhaupt, “Light-Valve Technologies for High-Definition Television Projection Displays”, Displays, 1991, vol. 12, No. 3/4, pp. 115-128.
Peterson, K.E., “Micromechanical Light Modulator Array Fabricated on Silicon”, Applied Physics Letters, American Institute of Physics, vol. 31, No. 8, Oct. 15, 1977, pp. 521-523.
Cadman et al., “New Micromechanical Display Using Metallic Thin Films”, IEEE Electron Device Letters, Jan. 1983, vol. EDL-4 No. 1, pp. 3-4.
Thomas et al., “The Mirror Matrix Tube: A Novel Light Valve for Projection Displays”, IEEE Transactions on Electron Devices, vol. Ed-22 No. 9, Sep. 1975, pp. 765-775.
Hornbeck, “Digital Light Processing (TM) for High-Brightness, High Resolution Applications”, Texas Instruments, Inc., date unknown, pp. 1-14.
Yoder, “The Digital Display Technology of the Future”, Texas Instruments, Inc., date unknown, pp. 1-11.
Peterson, “Silicon Torsional Scanning Mirror”, IBM J. Res. Develop., vol. 24 No. 5, Sep. 1980 pp. 631-637.
Espinosa et al., “Identification of Residual Stress State in an RF-MEMS Device”, MTS Systems Corporation white paper (May 2000).
Franka et al., “Solder Bump Technology: Present and Future”, Semiconductor Fabtech (May 1995).
Glenn et al., “Packaging Microscopic Machines”, Machine Design (Dec. 7, 2000).
Harsh et al., “Flip-Chip Assembly for Si-Based MEMS”, Proceedings of the 1999 IEEE International Conference on Microelectromechanical Systems (MEM '99), Orlando, FL (Jan. 17-21, 1999), pp. 273-278.
Irwin et al., “Quick Prototyping of Flip Chip Assembly with MEMS”, University of Colorado at Boulder white paper (Jul. 17, 2000).
.Irwin et al., “Quick Prototyping of Flip-Chip Assembly with MEMS”, portions of slide presentation from the NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics at the University of Colorado at Boulder (1998).
Lee et al., “High-Q Tunable Capacitors and Multi-way Switches Using MEMS for Millimeter-Wave Applications”, portions of slide presentation from the NSF Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics at the University of Colorado at Boulder (Sep. 1998).
Lee et al., “Use of Foundry Services to Prototype MEMS for Millimeter-wave Applications”, portions o
Huibers Andrew G.
Patel Satyadev R.
Brady III W. James
Lester Evelyn A.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
LandOfFree
Spatial light modulators with light blocking/absorbing areas does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Spatial light modulators with light blocking/absorbing areas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spatial light modulators with light blocking/absorbing areas will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2800181