Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-10-25
2005-10-25
Sugarman, Scott J. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000
Reexamination Certificate
active
06958846
ABSTRACT:
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
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Huibers Andrew G.
Richards Peter W.
Hanig Richard
Muir Gregory R.
Reflectivity, INC
Sugarman Scott J.
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