Spatial light modulators with light absorbing areas

Details Spatial light modulators with light absorbing areas Spatial light modulators with light absorbing areas

2005-01-18

2005-01-18

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S291000, C359S295000, C359S846000, C345S109000, C428S408000

Reexamination Certificate

active

06844959

ABSTRACT:
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

REFERENCES:
patent: 4383255 (1983-05-01), Grandjean et al.
patent: 4564836 (1986-01-01), Vuilleumier et al.
patent: 5719695 (1998-02-01), Heimbuch
patent: 5835256 (1998-11-01), Huibers
patent: 6046840 (2000-04-01), Huibers
patent: 6071616 (2000-06-01), Sulzbach et al.
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6618186 (2003-09-01), Kaeriyama
patent: 20020058900 (2002-05-01), Liu et al.
patent: 20020109903 (2002-08-01), Kaeriyama
patent: 0069226 (1986-03-01), None
Cadman, New Micromechanical Display Using Thin Metallic Films, IEEE Electron Device Letters vol. EDL-4, No. 1, Jan. 1983.
Colgan, Optimazation of Light-Valve Mirrors, 1996 SID International Symposium—Digest of Technical Papers, vol. 29; Anaheim, CA; May 1998, pp. 1071-4.
Melcher, High Information Content Projection Display Based on Reflective LC on Silicon Light Valves, 1998 SID International Symposium—Digest of Technical Papers, vol. 29; Anaheim, CA May 1998, pp. 25-8.

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