Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1996-12-05
1998-02-17
Nelms, David C.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359846, G02B 2600
Patent
active
057196958
ABSTRACT:
A high contrast spatial light modulator (40) formed of micro-mechanical pixels (10). The supporting superstructure comprising the posts (12) and hinges (16) of the pixels (10) are shielded by an umbrella-like elevated light shield (42) extending over the hinge and posts. These light shields (42) are generally square in shape, and have edges arranged at approximately 45.degree. with respect to the incident light to minimize diffraction of light therefrom into projection optics. The upper surfaces of the shields may be anodized to achieve a non-reflective, black surface when viewed through darkfield optics. The shields (42) are fabricated using conventional semiconductor processes, which are a natural extension of the baseline process.
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Bey Dawn-Marie
Donaldson Richard L.
Kesterson James C.
Klinger Robert C.
Nelms David C.
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