Spatial light modulator with structured mirror surfaces

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S290000, C359S292000, C359S295000, C359S298000, C359S224200, C250S548000, C250S492200, C355S053000, C355S067000, C355S077000, C345S085000, C345S108000, C348S744000, C348S770000, C348S771000

Reexamination Certificate

active

08077377

ABSTRACT:
The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.

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