Spatial light modulator with robust mirror substrate condition

Optical: systems and elements – Light interference – Produced by coating or lamina

Reexamination Certificate

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Details

C359S586000, C359S589000, C359S290000

Reexamination Certificate

active

07085059

ABSTRACT:
A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.

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