Spatial light modulator with improved light shield

Details Spatial light modulator with improved light shield Spatial light modulator with improved light shield

1997-10-27

1999-09-14

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave directional modulation

359223, 359290, 359291, 359295, G02B 2608

Patent

active

059531533

ABSTRACT:
A spatial light modulator (10) having a micromechanical active portion (12) encompassed by a light shield (14). The light shield (14) is fabricated upon a substrate (36) and has a plurality of openings (72, and 80) to permit underlying layers of photoresist (90, 92) to be undercut from beneath the light shield. Removal of the photoresist layers provides a sufficiently flat light shield, and eliminates the possibility that particles from the photoresist layer could migrate to beneath active micromirrors (30) of the spatial light modulator (12).

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5105369 (1992-04-01), Nelson
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5597736 (1997-01-01), Sampsell
patent: 5719695 (1998-02-01), Heimbuch
patent: 5818095 (1998-10-01), Sampsell

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