Spatial light modulator with buried passive charge storage cell

Details Spatial light modulator with buried passive charge storage cell Spatial light modulator with buried passive charge storage cell

1995-02-02

1997-09-23

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

G02B 2600

Patent

active

056710836

ABSTRACT:
A monolithic DMD spatial light modulator (20) including a storage cell array (24) of charge storage elements (30). Each charge storage cell (30) is formed using robust MOS processes, and comprises a pair of capacitors (32) having a polysilicon electrode fabricated over a substrate, and separated by a thin oxide dielectric. Each capacitor (32) is shielded by several light impermeable metal shields (37, 64, 66, 68, 72, 74, 80, 82, 88) to prevent discharging due to light incident to SLM (20). The substrate electrode (38) is encompassed by an n+ doped region (42) providing a source of minority carriers to an inversion region under the polysilicon electrode (50).

REFERENCES:
patent: 4626920 (1986-12-01), Glenn
patent: 4638309 (1987-01-01), Ott
patent: 5061049 (1991-10-01), Hornbeck
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5105369 (1992-04-01), Nelson
patent: 5278652 (1994-01-01), Urbanus
patent: 5535047 (1996-07-01), Hornbeck

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