Spatial light modulator using an integrated circuit actuator

Details Spatial light modulator using an integrated circuit actuator Spatial light modulator using an integrated circuit actuator

2008-06-10

2008-06-10

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S295000, C359S224200, C359S290000

Reexamination Certificate

active

07385750

ABSTRACT:
A spatial light modulator (SLM) includes an integrated circuit actuator that can be fabricated using photolithography or other similar techniques. The actuator includes actuator elements, which can be made from piezoelectric materials. An electrode array is coupled to opposite walls of each of the actuator elements is an electrode array. Each array of electrodes can have one or more electrode sections. The array of reflective devices forms the SLM.

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