Spatial light modulator, spatial light modulator array, and...

Details Spatial light modulator, spatial light modulator array, and... Spatial light modulator, spatial light modulator array, and...

2007-01-16

2007-01-16

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100, C359S295000, C345S085000

Reexamination Certificate

active

10946099

ABSTRACT:
A spatial light modulator has a substrate; a movable member which is disposed so as to hang across the substrate in a displaceable manner and has a conductive section provided in at least a portion of the movable member; an optical function film which follows mechanical displacement of the movable member and is fixed to the same; and a drive fixed electrode which is disposed outside a range of mechanical displacement of the movable member and displaces and drives the movable member. Electrostatic attractive force is generated between the movable member and the driving fixed electrode by applying a drive voltage between the conductive section of the movable member and the driving fixed electrode, thereby displacing and driving the movable member, bringing the same into a stationary state in a non-contacting manner, and modulating light radiated on the optical function film.

REFERENCES:
patent: 6778304 (2004-08-01), Muller
patent: 8-334709 (1996-12-01), None
patent: 2001-242395 (2001-09-01), None

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