Spatial light modulator, spatial light modulator array, and...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S290000, C359S295000, C353S098000, C353S099000

Reexamination Certificate

active

07027206

ABSTRACT:
A spatial light modulator for changing transmittance of incident light from a light source to perform light modulation, the spatial light modulator comprising: a plane substrate transparent for the incident light; a first electrode being provided on the plane substrate; a deformable member being provided above the plane substrate and containing a second electrode placed with a gap above said first electrode, the deformable member deforming in response to an electrostatic force occurring as voltage is applied to said first electrode and the second electrode; and an optical function film being formed on the deformable member, wherein the optical function film has incidence angle dependency that the transmittance of the incident light changes in response to an incidence angle of the incident light on the optical function film, and is inclinable relative to the plane substrate in response to the electrostatic force.

REFERENCES:
patent: 6195196 (2001-02-01), Kimura et al.
patent: 6930816 (2005-08-01), Mochizuki
patent: 2004/0189952 (2004-09-01), Kuratomi
patent: 8-334709 (1996-12-01), None

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