Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-09-06
2009-08-18
Sugarman, Scott J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S298000
Reexamination Certificate
active
07576902
ABSTRACT:
In accordance with the teachings of the present invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the present invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al—Cu alloy. A controller electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.
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Barron, L., Thesis entitled: “High-Reflectance, Sputter-Deposited Aluminum Alloy Thin Films for Micro-Electro-Mechanical System”, Materials Science & Engineering Dept., Rochester Institute of Technology, 213 pages.
Barron, L.; “High-Reflectance, Sputter-Deposited Aluminum Alloy Thin Films for Micro-Electro-Mechanical Systems;” MS Materials Science & EngineeringThesis Defense PowerPoint presentation; 45 pages.
Barron Lance W.
Neidrich Jason M.
Brady III Wade James
Stephens Dawn V.
Sugarman Scott J
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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