Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-01-22
2008-01-22
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07321417
ABSTRACT:
A spatial light modulator used to pattern a radiation beam comprises an array of pixels disposed on a support. Each pixel has a light modulating element for modulating the radiation beam and a control circuit that positions the light modulating elements according to a desired pattern. The control circuit is disposed on the opposite side of the support than the light modulating elements. The control circuit comprises at least one of a digital to analog converter, an analog to digital converter, an optical fiber input, and a processor.
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ASML Netherlands B.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox PLLC
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