Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1995-05-31
1997-05-13
Epps, Georgia Y.
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359214, G02B 2600
Patent
active
056297947
ABSTRACT:
A spatial light modulator (40, 70, 80) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) is supported by a torsion hinge (44) along a torsion axis. A plurality of flexure hinges (48) are provided to support the corners of the mirror (42, 72) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60).
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Boysel Robert M.
Florence James M.
Magel Gregory A.
Bey Dawn-Marie
Donaldson Richard L.
Epps Georgia Y.
Kesterson James C.
Klinger Robert C.
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