Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2008-01-08
2008-01-08
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By polarized light examination
C349S104000
Reexamination Certificate
active
07317527
ABSTRACT:
A filter to selectively block light from passing through the filter and to selectively permit light to pass through the filter. The filter includes an array with a plurality of individually addressable filter elements. Each filter element is selectively settable to have a variable transmittance to the light of between substantially zero percent and substantially one hundred percent. In this manner, the filter according to the present invention provides areas that pass only a portion of the light, and thus can block the light using patterns other than just an abrupt on/off filtering. By so doing, the filter is able to dramatically reduce, and in some embodiments eliminate, the light ringing that typically accompanies such on/off filters.
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Chen Grace H.
Fu Tao-Yi
Maciuca Dragos
Chowdhury Tarifur
Cook Jonathon D
KLA-Tencor Technologies Corporation
Luedeka Neely & Graham P.C.
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