Spatial light modulator featured with an anti-reflective...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S291000, C359S298000

Reexamination Certificate

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07542197

ABSTRACT:
A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.

REFERENCES:
patent: 6958846 (2005-10-01), Huibers et al.
patent: 02003086835 (2001-09-01), None

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