Spatial light modulator array with heat minimization and...

Details Spatial light modulator array with heat minimization and... Spatial light modulator array with heat minimization and...

2007-01-30

2007-01-30

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100

Reexamination Certificate

active

11237382

ABSTRACT:
An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.

REFERENCES:
patent: 5311360 (1994-05-01), Bloom et al.
patent: 6317947 (2001-11-01), Ruschmann
patent: 2003/0007226 (2003-01-01), Buzzetta
patent: 2004/0008406 (2004-01-01), Blitstein
patent: 2006/0050356 (2006-03-01), Varaprasad et al.
patent: 2006/0109576 (2006-05-01), Baba-Ali

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