Spatial light modulator and mirror device

Computer graphics processing and selective visual display system – Plural physical display element control system – Display elements arranged in matrix

Reexamination Certificate

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Details

C345S085000, C345S055000, C359S292000

Reexamination Certificate

active

07969395

ABSTRACT:
The present invention discloses a spatial light modulator includes a plurality of pixel elements disposed on a substrate. Each of the pixel elements comprises a deflectable micromirror. Specifically, instead of SRAM, the spatial light modulator is implemented with a DRAM in each of the pixel elements. The DRAM in each of the pixel elements has a smaller number of transistors than SRAM. The spatial light modulator can be manufactured with smaller pixel size and circuit configuration with improved withstand voltage. Further improvements can also be achieved for manufactured the spatial light modulator with smaller capacitor with better layout configuration for wire connections and control signal transmissions.

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