Spatial light modulator and mirror array device

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S290000

Reexamination Certificate

active

07876492

ABSTRACT:
The present invention provides a spatial light modulator, comprising: a plurality of mirror elements; a plurality of address electrodes for controlling the movement of each of the mirror elements; and first and second control circuits for generating a voltage in the address electrode, wherein the second control circuit applies a voltage to the address electrode when the mirror element is in a moving state.

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