Spatial light modulator and method

Details Spatial light modulator and method Spatial light modulator and method

1985-10-30

1987-05-05

Corbin, John K.

Modulators

Amplitude modulator

Nonlinear device controlled by modulating signal

332 751, 350320, G02B 2602, G02B 0000, H01S 300

Patent

active

046627464

ABSTRACT:
An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a spacer made of photoresist which in turn is on a semiconductor substrate. The substrate contains addressing circuitry in a preferred embodiment.

REFERENCES:
patent: 3600798 (1971-08-01), Lee
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 3896338 (1975-07-01), Nathanson et al.
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4596992 (1986-06-01), Hornbeck

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