Spatial light modulator and method

Modulators – Amplitude modulator – Nonlinear device controlled by modulating signal

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Details

350269, 350360, 358231, 313465, G02F 127, B44C 122, H04N 574

Patent

active

047107324

ABSTRACT:
Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.

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