Spatial light modulator

Details Spatial light modulator Spatial light modulator

1988-10-28

1990-09-11

Moskowitz, Nelson

Amplifiers

Parametric amplifiers

Semiconductor type

350310, 350269, 358231, G07F 129, B44C 122, C03C 1500

Patent

active

049566199

ABSTRACT:
A deflectable beam spatial light modulator formed from a structure of a reflecting layer, typically metal, on a spacer layer, typically photoresist, which in turn is on a substrate containing electronic addressing circuitry is disclosed. Also, the method of fabrication including a plasma etch after dicing of the substrate into chips is disclosed.

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Pape et al, "Characteristics . . . Information Processing", 12/83, Optical Eng., vol. 22, #6, pp. 675-681; SPIE Paper of 1/20/83.
Hornbeck, "128-128 Deformable Mirror Device", 5/83, pp. 539-545,IEEE Trans. Elect. Devices, vol. ED-30, #(Abst.).
Ibid at Conf. Record of 10/21/82, at Intren. Display Research Conf., pp. 76-79, N.J. (Abst.).
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