Spatial light modulator

Details Spatial light modulator Spatial light modulator

1989-09-28

1990-09-04

Moskowitz, Nelson

Amplifiers

Parametric amplifiers

Semiconductor type

350487, 350 66, G02B 2608

Patent

active

049547895

ABSTRACT:
An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.

REFERENCES:
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patent: 3746911 (1973-07-01), Nathanson et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4492435 (1985-01-01), Banton et al.
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patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 4698602 (1987-10-01), Armitage
patent: 4710732 (1987-01-01), Hornbeck
patent: 4842396 (1989-06-01), Minouka et al.
"Miniature Components Carved from Silicon May be used as Microsensors and Valves", Electronics, May 17, 1984, pp. 82-83.
Florence et al., "Operation of a Deformable Mirror Device as a Fourier Plane Phase Modulating Filter", 938 SPIE, 1988, pp. 2-10.
Horner et al., "Phase-Only Matched Filtering", 23 Appl. Optics 812, 1984.

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