Radiant energy – Electron energy analysis
Patent
1994-07-08
1996-04-09
Anderson, Bruce C.
Radiant energy
Electron energy analysis
H01J 4700
Patent
active
055064132
ABSTRACT:
The spatial-focus energy analyzer consists of an aperture plate (a) in the shape of a wedge, with the actual aperture at the apex of the wedge, an analyzing region (b) in the shape of a rectangular box with a hole in one end through which the aperture plate protrudes and a wide slit at the other end, an image plane (c) with a thin slit in it, and a particle detector (d). The preferable particle detector is a microchannel plate with a segmented anode, although a simple conducting plate (segmented or not) may be used connected to one or more analog current meters if the particle flux is large enough. In operation, the device is aligned to that the flux of particles to be analyzed enter the entrance aperture. The particle flux or current is measured as a varying voltage is applied to the analyzing structure. Particles with a given energy will have trajectories within the analyzing region will be focused on the slit in the image plane. Particles with different energies will be defocused and hence unable to pass through the slit and onto the active areas of the particle detector. Because of the particular trajectory that the particles take, the position of the particle on the active are of the particle detector is uniquely related to the angle of incidence of the particle as it enters the device.
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Anderson Bruce C.
Auton William G.
The United States of America as represented by the Secretary of
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