Spatial filtering in interferometry

Details Spatial filtering in interferometry Spatial filtering in interferometry

2005-06-14

2005-06-14

Mathews, Alan (Department: 2851)

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C355S077000, C356S498000, C356S509000

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06906784

ABSTRACT:
Spatial filtering of beams in interferometry systems is used to reduce a displacement of the beams from an optical path corresponding to the path of the beams in an optimally-aligned system. By reducing beam displacement from the optical path, the system reduces the magnitude of beam shears and associated non-cyclic errors in linear and angular displacements measured by the interferometry systems.

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