Spatial filtering for error detection

Optics: measuring and testing – Range or remote distance finding – With photodetection

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356 71, 356239, G02B 2738

Patent

active

039815625

ABSTRACT:
Fourier transform imaging microscope for examining parts carrying repetitive stripe pattern having a source of light with means forming a slit through which the light passes. Means including the part carrying the repetitive stripe pattern is used for forming a Fourier transform image of the slit after the light beam passes through it. Slit means is provided for suppressing the image of the stripe pattern itself while enhancing any defects and non-uniformities in the pattern.

REFERENCES:
patent: 3305834 (1967-02-01), Cooper et al.
patent: 3614232 (1971-10-01), Mathisen
patent: 3633998 (1972-01-01), Bourrouilh
patent: 3658420 (1972-04-01), Axelrod
patent: 3743423 (1973-07-01), Heinz et al.
patent: 3813173 (1974-05-01), Teter
Watkins, Proc. of the IEEE, vol. 57, No. 9, Sept. 1969, pp. 1634-1639.

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