Spatial filter used in a reduction-type projection printing appa

Details Spatial filter used in a reduction-type projection printing appa Spatial filter used in a reduction-type projection printing appa

1994-08-23

1997-06-24

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, H01L 2127, G03B 2742, G03B 2752

Patent

active

056421834

ABSTRACT:
A spatial filter used in a reduction-type projection printing apparatus includes a central region through which a light beam passes at transmittance of at most a prescribed value, a substantially transparent peripheral region which surrounds the central region, and a phase shifter for producing phase difference of 180.degree. between light beams passing through the central region and the peripheral region.

REFERENCES:
patent: 5316896 (1994-05-01), Fukuda et al.
patent: 5323208 (1994-06-01), Fukuda et al.
patent: 5329333 (1994-07-01), Noguchi et al.
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5369464 (1994-11-01), Kamon
patent: 5389474 (1995-02-01), Iguchi et al.
patent: 5393623 (1995-02-01), Kamon
patent: 5418598 (1995-05-01), Fukuda et al.
patent: 5440426 (1995-08-01), Sandstrom
MicroProcess '93 The 6th International MicroProcess Conference pp. 40-41, Jul., 1993.

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