Optical: systems and elements – Optical modulator
Reexamination Certificate
2005-08-16
2005-08-16
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
C359S308000, C359S641000, C356S369000, C356S327000, C356S073000, C356S445000, C250S226000, C250S227150, C250S372000, C073S657000, C600S476000
Reexamination Certificate
active
06930813
ABSTRACT:
Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
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He Ping
Herzinger Craig M.
Johs Blaine D.
Liphardt Martin M.
Welch James D.
Ben Loha
J.A. Woollam Co. Inc.
Welch James D.
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