Spatial filter for sample inspection system

Details Spatial filter for sample inspection system Spatial filter for sample inspection system

2007-02-27

2007-02-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S239700, C356S600000

Reexamination Certificate

active

10798024

ABSTRACT:
Spatial filtering is disclosed that improves the signal to noise ration of a sample inspection system of the type having a detector and collection optics that receive radiation scattered from a point on a sample surface and direct the scattered radiation toward the detector. The spatial filtering may screen the detector from substantially all of the forward-scattered radiation from back-scattered radiation that is scattered in a at an elevation angle less than about 45° with respect to a normal to the surface. Forward scattered noise is screened from the detector while backscattered signal reaches the detector. Programmable spatial filters may be used to selectively block scattered noise due to surface roughness while transmitting scattered signal due to surface defects.

REFERENCES:
patent: 5659390 (1997-08-01), Danko
patent: 5986781 (1999-11-01), Long
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6538730 (2003-03-01), Vaez-Iravani et al.
patent: 6862096 (2005-03-01), Vaez-Iravani et al.
patent: 6956644 (2005-10-01), Biellak et al.
patent: 7002677 (2006-02-01), Bevis et al.

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