Sparger plate for ozone gas diffusion

Details Sparger plate for ozone gas diffusion Sparger plate for ozone gas diffusion

1990-10-29

1992-01-21

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156646, 134 31, 134102, B44C 122, H01L 21306, B08B 500

Patent

active

050825186

ABSTRACT:
A gas diffusion system for evenly distributing injected gas in a bath including a diffusion sparger plate for spreading and distributing the gas. Gas moves horizontally under the plate, and is relayed upward through a set of gas passages in the plate.

REFERENCES:
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4491496 (1985-01-01), Laporte et al.

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