Spacers for field emission display and their fabrication method

Details Spacers for field emission display and their fabrication method Spacers for field emission display and their fabrication method

1996-02-20

1998-12-01

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

H01J 924

Patent

active

058428976

ABSTRACT:
The invention is to provide the method for fabricating the spacers which are mechanically strong and have lower outgassing rate. Spacers in this invention are made of photosensitive glass. A net shaped photosensitive glass is etched by a first photolithography process and then the side wall of it is etched again by a second photolithography process for improving the efficiency of evacuation of the internal cavity of an FED.

REFERENCES:
patent: 2933648 (1960-04-01), Bentley
patent: 5413513 (1995-05-01), Horne et al.
patent: 5503582 (1996-04-01), Cathey, Jr. et al.
FOTOFORM: A Material and a Capability; a Corning Advertising Brochure, Date Unknown.

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