Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-02-20
2007-02-20
Xuan-Dang, Hung (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S248000
Reexamination Certificate
active
11002766
ABSTRACT:
A method for use in manufacturing a microelectromechanical system, such as a reflective stealth mirror includes the steps of: forming an I-shape mirror structure; forming a spacer layer over the I-shape mirror structure; and patterning the spacer layer to form at least one spacer along a side of the I-shape mirror structure.
REFERENCES:
patent: 5216537 (1993-06-01), Hornbeck
patent: 6360033 (2002-03-01), Lee et al.
patent: 6608712 (2003-08-01), Michalicek
Peter F. Van Kessel et al., “A MEMS-Based Projection Display” IEEE Expert, Volumn 86, No. 8, Aug. 1998.
Chen Fei-Yun
Liu Hung-Hsin
Pan Sheng-Liang
Wang Wei-Ya
Wu Shan-Hua
Duane Morris LLP
Tra Tuyen
Xuan-Dang Hung
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