Source replenishment device for vacuum deposition

Details Source replenishment device for vacuum deposition Source replenishment device for vacuum deposition

1986-05-15

1988-10-11

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118726, C23C 1424

Patent

active

047762993

ABSTRACT:
A material source replenishment device for use with a vacuum deposition apparatus. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.

REFERENCES:
patent: 2403199 (1946-07-01), Swope
patent: 3503368 (1970-03-01), Pudliner
patent: 3563202 (1971-02-01), Mackrael
patent: 3714925 (1973-02-01), Helm
patent: 4100879 (1978-07-01), Goldin
Tzanavaras, IBM Tech. Dis. Bul., vol. 12, No. 11, Apr. 1970.

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