Source of ions with at least two ionization chambers, in particu

Details Source of ions with at least two ionization chambers, in particu Source of ions with at least two ionization chambers, in particu

1986-10-01

1988-11-01

Niebling, John F.

Radiant energy

Ion generation

Field ionization type

31511181, 31511191, 376127, H01J 2702

Patent

active

047822350

ABSTRACT:
The ion source comprises a cathode, an intermediate electrode and an anode with two ionization chambers between these electrodes, means for producing an axial magnetic field, means for applying a DC voltage between an intermediate electrode and the anode, ion extraction means and an alternating voltage generator between the cathode and the intermediate electrode.

REFERENCES:
patent: 3408283 (1968-10-01), Chopra et al.
patent: 3409529 (1968-11-01), Chopra et al.
patent: 3472751 (1969-10-01), King
patent: 3474021 (1969-10-01), Davidse et al.
patent: 3732158 (1973-05-01), Przybyszewsky
patent: 3767551 (1973-10-01), Lang, Jr. et al.
patent: 3838031 (1974-09-01), Snaper
patent: 4093858 (1978-06-01), Kobayashi et al.
patent: 4342631 (1982-08-01), White et al.
patent: 4377773 (1983-03-01), Hershcovitch et al.
patent: 4521719 (1985-06-01), Liebel
Nishimura et al., "An Oxygen Ion Source for the Secondary Ion Mass Spectrometer", Mass Spectrometer, vol. 23, No. 1, 3/75, pp. 9-14.

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