Source of ions of the triode type with a single high frequency e

Details Source of ions of the triode type with a single high frequency e Source of ions of the triode type with a single high frequency e

1988-11-15

1989-10-10

Anderson, Bruce C.

Radiant energy

Fluent material containment, support or transfer means

With irradiating source or radiating fluent material

250251, 2504922, H01J 2700

Patent

active

048734454

ABSTRACT:
An ion source of the triode type is provided having a single ionization chamber, high frequency excitation and magnetic confinement of the multipole type, comprising: a single ionization chamber; an amagnetic cathode forming a capacitor plate and cooled by the flow of a fluid; an amagnetic anode forming at least a part of the wall of the ionization chamber; a circuit for applying a high frequency AC voltage between the cathode and the anode; a third electrode; an arrangement for biasing the third electrode independently with respect to the cathode-anode assembly; a system of alternate magnetic poles adapted for creating a multimirror magnetic configuration about the anode; a gas injection arrangement for injecting at least one gas to be ionized into the chamber; at least one orifice for discharging the gases from the chamber; and a controlled pump for exhausting gases out of the chamber through said at least one orifice.

REFERENCES:
patent: 3956666 (1976-05-01), Reader et al.
patent: 4352974 (1982-10-01), Mizutani et al.
patent: 4481062 (1984-11-01), Kaufman et al.
patent: 4559477 (1985-12-01), Leung et al.
patent: 4602161 (1986-07-01), Whealton et al.
patent: 4782235 (1988-01-01), Lejeune et al.
IBM Technical Disclosure Bulletin, vol. 24, No. 11B, Apr. 1982, 320 Applied Physics Letters, 45 (1984) Jul., No. 2, New York, USA.
RF Multipolar Plasma For Broad and Reactive Ion Beams, Electrostatic Reflex Plasma Source as a Plasma Bridge Neutralizer.

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