Fluent material handling – with receiver or receiver coacting mea – With soil removing – coating – lubricating – sterilizing and/or... – With cleaning – coating or drying means
Reexamination Certificate
2002-11-13
2009-02-10
Maust, Timothy L (Department: 3751)
Fluent material handling, with receiver or receiver coacting mea
With soil removing, coating, lubricating, sterilizing and/or...
With cleaning, coating or drying means
C141S011000, C141S069000, C141S063000, C141S100000, C141S302000
Reexamination Certificate
active
07487806
ABSTRACT:
A source liquid supply apparatus and method that avoids leaving source liquid-and/or cleaning fluid-derived residues in the vicinity of the connection region between the source liquid feed conduit and the source tank. A flow-switching mechanism is attached to the source tank of a source liquid supply apparatus. This flow-switching mechanism has a first port connected to the discharge port conduit of the source tank, a second port connected to a feed conduit, and a third port connected to an exhaust conduit. The first port can be closed by a valve member on a diaphragm disposed within a common compartment while communication is maintained between the second and third ports. A cleaning fluid source and a purge gas source are connected to the feed conduit. Purge gas and cleaning fluid fed into the feed conduit are discharged from the second and third ports and through the exhaust conduit.
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Girard Jean-Marc
Kimura Masao
Letessier Olivier
Nasu Akinobu
Clark Brandon S.
L'Air Liquide, Societe Anonyme A Directorie et Conseil de Survei
Maust Timothy L
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