Sound detecting mechanism

Details Sound detecting mechanism Sound detecting mechanism

2008-06-10

2008-06-10

Le, Huyen (Department: 2615)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S175000, C381S191000

Reexamination Certificate

active

07386136

ABSTRACT:
A sound detecting mechanism is provided which forms a diaphragm with a required thickness by thickness control and yet restrains distortion of the diaphragm to provide high sensitivity.The sound detecting mechanism comprises a pair of electrodes forming a capacitor on a substrate A in which one of the electrodes is a back electrode C forming perforations Ca therein corresponding to acoustic holes and the other of the electrodes is a diaphragm B. The diaphragm B is mounted on the substrate A while the back electrode C is mounted in a position opposed to the diaphragm B across a void F to be supported by the substrate A, the back electrode C being formed by polycrystal silicon of 5 μm to 20 μm in thickness.

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