Sorption pump

Details Sorption pump Sorption pump

1993-09-17

1995-03-28

Spitzer, Robert

Gas separation: apparatus

Solid sorbent apparatus

Plural diverse separating means

96147, 417 48, B01D 5304

Patent

active

054012988

ABSTRACT:
A sorption pump for high vacuum applications that is suited for use in gas analyzers such as mass spectrometers. The pump includes a housing containing a quantity of getter material and a diffusion barrier in the gas inlet to the housing. A finite period of time is required for gas molecules in the vacuum analyzer system to cross the barrier, thus providing a window during which gas pulses can be accurately analyzed.

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