Sorbent-based gas storage and delivery system for dispensing of

Details Sorbent-based gas storage and delivery system for dispensing of Sorbent-based gas storage and delivery system for dispensing of

1998-05-21

2000-10-17

Spitzer, Robert

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

95 90, 95 95, 95901, 95902, 96 4, 96143, B01D 5322, B01D 5304

Patent

active

061324922

ABSTRACT:
A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof in the storage and dispensing vessel. Desorbed sorbate gas is discharged from the storage and dispensing vessel by a dispensing assembly coupled to the vessel. The chemisorbent may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane, and installed in the vessel at the time of sorbent material loading. Semiconductor manufacturing processes and products manufactured by such processes are described.

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