Sonic energy process chamber

Details Sonic energy process chamber Sonic energy process chamber

2005-03-11

2008-03-04

Williams, Hezron (Department: 2856)

Measuring and testing

Miscellaneous

C134S001300, C134S902000

Reexamination Certificate

active

07337663

ABSTRACT:
A system for processing a workpiece includes a base having a bowl or recess for holding a processing fluid. A sonic energy source, such as a megasonic transducer, provides sonic energy into a processing fluid in the bowl. A process head holds a workpiece. A process head lifter lowers the head holding the workpiece into the processing fluid in the bowl. Sonic energy is provided to the workpiece through the processing fluid, optionally while the processing head spins the workpiece. The processing fluid may include de-ionized water and an etchant.

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