Solvent systems for polymeric dielectric materials

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate

Reexamination Certificate

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C528S125000, C528S167000, C528S403000, C528S410000, C528S422000, C528S480000, C528S494000, C528S503000, C525S390000, C428S411100

Reexamination Certificate

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06878796

ABSTRACT:
Aromatic aliphatic ether solvents, such as anisole, methylanisole, and phenetole, have been found useful in formulating coating solutions of polymeric dielectric materials and as a clean up solvent in the coating process. A process for forming a dielectric film on a substrate includes depositing a coating solution of a dielectric material in a formulation solvent onto a surface of the substrate and depositing an aromatic aliphatic ether solvent onto an edge portion of the surface of the substrate. The process is used to form films of dielectric materials including arylene ether dielectric polymers, hydridosiloxane resins, organohydridosiloxane resins, spin-on-glass materials, partially hydrolyzed and partially condensed alkoxysilane compositions which are cured to form a nanoporous dielectric silica material, and poly(perhydrido)silazanes.

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Purdy, et al., entitled “The dissolution of copper in common solvents used for low dielectric polymers”, dated 1997, pp. 486-489.

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