Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent
1992-12-22
1994-05-10
Breneman, R. Bruce
Cleaning and liquid contact with solids
Processes
For metallic, siliceous, or calcareous basework, including...
134 10, 134 12, 252 794, B08B 308
Patent
active
053104285
ABSTRACT:
Disclosed is a method of thermally stabilizing an effluent stream from an industrial process, such as a photolithographic process, to allow thermally manageable recovery of the solvent. In the separation and recovery process the solvent is exposed to temperatures that can cause polymerization of the relatively small amounts of monomer still contained therein. This polymerization is an exothermic polymerization, which can accelerate the polymerization of the remaining monomer, potentially causing a thermally initiated, exothermic, run away polymerization. Run away, thermally initiated, exothermic polymerization can materially degrade the solvent. The thermally initiated, run away exothermic reaction is inhibited by the inclusion of a thermal stabilizer or polymerization inhibitor.
REFERENCES:
patent: 3764384 (1973-10-01), Berni
patent: 4590301 (1986-05-01), Lim et al.
patent: 4748218 (1988-05-01), Sharaby
patent: 5064557 (1991-11-01), Fusiak
Bhatt Anilkumar C.
Papathomas Kostas I.
Sinclair Terry D.
Wagner Jerome J.
Breneman R. Bruce
Dunn Jr. Thomas G.
Goldman Richard M.
Inernational Business Machines Corporation
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